Diagnostic techniques for semiconductor materials and devices (Montreal PQ, 6-8 May 1997)Rai-Choudhury, P; Benton, J.L; Schroder, D.K et al.SPIE proceedings series. 1997, isbn 0-8194-2765-9, IX, 478 p, isbn 0-8194-2765-9Conference Proceedings

Digital averaging and recording of DLTS signalsKOLEV, P; DEEN, M. J; ALBERDING, N et al.SPIE proceedings series. 1997, pp 377-388, isbn 0-8194-2765-9Conference Paper

Light scattering tomography for characterization of semiconductorsOGAWA, T; KISSINGER, G; NANGO, N et al.SPIE proceedings series. 1997, pp 132-146, isbn 0-8194-2765-9Conference Paper

Silicon on insulator characterization techniques and resultsWETTEROTH, T.SPIE proceedings series. 1997, pp 177-186, isbn 0-8194-2765-9Conference Paper

X-ray microbeam techniques and applicationsISAACS, E. D; EVANS-LUTTERODT, K; PINZONE, C et al.SPIE proceedings series. 1997, pp 49-59, isbn 0-8194-2765-9Conference Paper

ULSI device characterization using nano-SRPDE WOLF, P; TRENKLER, T; CLARYSSE, T et al.SPIE proceedings series. 1997, pp 92-101, isbn 0-8194-2765-9Conference Paper

Electrical impedance spectroscopy of siliconVEDDEL, J; VISCOR, P.SPIE proceedings series. 1997, pp 365-376, isbn 0-8194-2765-9Conference Paper

Integrated circuit tester using interferometric imagingDONALDSON, W. R; MICHAELS, E. M. R; AKOWUAH, K et al.SPIE proceedings series. 1997, pp 171-176, isbn 0-8194-2765-9Conference Paper

Characterization challenges for the ULSI ERASHAFFNER, T. J.SPIE proceedings series. 1997, pp 1-15, isbn 0-8194-2765-9Conference Paper

Carrier density and thermal images of transient filaments in GaAs photoconductive switchesFALK, R. A; ZUTAVERN, F. J; O'MALLY, M. W et al.SPIE proceedings series. 1997, pp 243-254, isbn 0-8194-2765-9Conference Paper

Concentration and depth measurements of boron in semiconductor materials using neutron depth profilingÜNLÜ, K; WEHRING, B. W; HOSSAIN, T. Z et al.SPIE proceedings series. 1997, pp 458-469, isbn 0-8194-2765-9Conference Paper

EBIC and TEM study of process induced defects in SOI wafersBONDARENKO, I. E; KONONCHUK, O. V; ROZGONYL, G. A et al.SPIE proceedings series. 1997, pp 32-38, isbn 0-8194-2765-9Conference Paper

An integrated spatial signature analysis and automatic defect classification systemGLEASON, S. S; TOBIN, K. W; KARNOWSKI, T. P et al.SPIE proceedings series. 1997, pp 204-211, isbn 0-8194-2765-9Conference Paper

Identification and quantification of trace metal impurities in silicon using the ELYMAT lifetime measurementGUPTA, D. C.SPIE proceedings series. 1997, pp 267-279, isbn 0-8194-2765-9Conference Paper

Monitoring of mobile sodium ions in SiO₂ using corona chargingSTEVIE, F. A; PERSSON, E; DEBUSK, D. K et al.SPIE proceedings series. 1997, pp 357-364, isbn 0-8194-2765-9Conference Paper

Use of focused ion beams as a diagnostic toolBANEJCE, I; KIRCH, S. J.SPIE proceedings series. 1997, pp 16-31, isbn 0-8194-2765-9Conference Paper

Diffusion and out-diffusion behavior of Fe in Si wafer for different annealingYOSHIMI, T; SHABANI, M. B; OKUUCHI, S et al.SPIE proceedings series. 1997, pp 452-457, isbn 0-8194-2765-9Conference Paper

Lattice strain and defects in epitaxial silicon wafersKIRSCHT, F; SNEGIREV, B; ZAUMSEIL, P et al.SPIE proceedings series. 1997, pp 60-67, isbn 0-8194-2765-9Conference Paper

Monitoring and reduction of alkali metal contamination in dielectric oxidesMAUTZ, K. E.SPIE proceedings series. 1997, pp 68-79, isbn 0-8194-2765-9Conference Paper

New concerns for detection of pinholes in the passivation layer of IC'sSABIN, E.SPIE proceedings series. 1997, pp 419-428, isbn 0-8194-2765-9Conference Paper

Non-contact characterization of ultrathin dielectrics for the gigabit ERAROY, P. K; CHACON, C; MA, Y et al.SPIE proceedings series. 1997, pp 280-294, isbn 0-8194-2765-9Conference Paper

Use of the contact potential difference probe to evaluate and minimize plasma damageFLORENCE, R. G; BAILEY, D. E.SPIE proceedings series. 1997, pp 350-356, isbn 0-8194-2765-9Conference Paper

Defect identification by using laser imaging confocal microscopy (LICM)CAI, C; URITSKY, Y; FRANCIS, T et al.SPIE proceedings series. 1997, pp 187-192, isbn 0-8194-2765-9Conference Paper

Direct observation and elimination of defects in gate oxide for reliable moslsisITSUMI, M.SPIE proceedings series. 1997, pp 147-159, isbn 0-8194-2765-9Conference Paper

Monitoring techniques of corrosive species affecting integrated circuit metal lithographyMAUTZ, K. E.SPIE proceedings series. 1997, pp 429-440, isbn 0-8194-2765-9Conference Paper